What the buyer needs
AI summaryOregon Tech seeks proposals from qualified suppliers to furnish, deliver, install, commission, and provide training and warranty support for one photolithography UV mask aligner system. The equipment will support the solar manufacturing education and research laboratory at the Wilsonville, Oregon campus, accommodating 3-inch and 4-inch wafers alongside top-side and backside alignment, UV exposure, tooling, controls, and documentation. Clarifying questions are due by October 29, 2026, at 5:00 PM Pacific Time, followed by a non-mandatory Notice of Interest deadline on October 30, 2026. Proposals must be submitted by November 6, 2026, at 1:00 PM Pacific Time and include a completed Bidder/Proposer Non-Discrimination and Oregon Tax Laws Certification sheet. Evaluators will assess proposals across six scoring areas: scope of work (25 points), cost summary (25 points), interview if applicable (25 points), background information (20 points), quality of proposal (15 points), and references review (15 points), for a total possible score of 125 points.
Scope of work
- Semi-automatic UV mask alignment and exposure system processing substrates from pieces through at least 6-inch diameter
- Top-side and backside alignment capability, including optical backside microscopes and infrared backside alignment
- Alignment performance supporting less than 5 micrometer alignment accuracy with an XY-theta alignment stage
- Video-view split-field microscopy using two high-definition cameras, widescreen monitor, motorized focus, and optical zoom
- UV LED exposure capability at approximately 365, 405, and 435/436 nm with independently programmable control
- Hard, soft, and vacuum contact printing modes, automatic wafer planarization or wedge-error compensation, and semi-automatic loading
- Included tooling: one backside-alignment wafer chuck, one mask holder for 4-inch x 4-inch masks, and mask adapter
- Delivery, factory-authorized installation, commissioning, documented acceptance testing, on-site training, and minimum one-year warranty
How proposals are evaluated
| Criterion | Weight / scoring |
|---|---|
| Background Information | 20 points |
| Scope of Work | 25 points |
| Cost Summary | 25 points |
| Quality of Proposal | 15 points |
| References Review | 15 points |
| Interview (if applicable) | 25 points |
Minimum qualifications
- Experience manufacturing, supplying, installing, commissioning, and supporting UV mask aligners or comparable equipment
- Identification of at least three comparable installations with client details and equipment model
- Proposers must be represented directly; participation by brokers or commissioned agents will not be allowed
Documents to include with your response
- Title Page or Cover Letter
- Completed Questionnaire for Proposers
- Bidder/Proposer Non-Discrimination and Oregon Tax Laws Certification sheet
- Detailed compliance matrix responding to each Scope of Work requirement
- Firm, itemized pricing and cost summary
- Three customer references
- Compliance documentation addressing country of origin and Build America, Buy America requirements
- Notice of Interest (optional)
How to submit
- Method
- Instructions
- Email to [email protected] with subject line 'Response to RFP # RFP #2026-06 Photolithography UV Mask Aligner System'. Standard 8.5x11 inch format, maximum file size 25 MB.